2014-№4(45) Article 14
I.A. Afinogenov, I.A. Zeltser, E.B. Trunin
Investigating the influence of chemical composition and morphological features of contact surfaces on electrical resistance and workability of mems-switchboards. P.149-171.
UDC 621.318.5:681.3
The chemical composition and morphological features of contact surfaces of MEMS-switchboards are investigated by means of x-ray photoelectron spectroscopy, atomic-force microscopy, scanning electron microscopy, and optical microscopy. The paper treats the influ-ence of various admixtures on surfaces. The paper maintains that admixtures of copper and aluminium, various pores and protuberances on the surface increase electrical resistance and decrease apparatuses’ workability.
The paper states that the chemical composition and mor-phological features of contact surfaces determine the stability of electrical resistance and, as a result, the workability of MEMS-switchboards.
microelectromechanical systems (MEMS),switchboard, chemical composition, mor-phology, contact surface, electrical resistance, x-ray photoelectron spectroscopy (XPS), atom-ic-force microscopy (AFM), scanning electron microscopy (SEM), surface impurities
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