2014-№3(44) Article 12

I.A. Afinogenov, I.A. Zeltser, E.B. Trunin

The analysis of factors that determine chemical composition and morphological characteristics of contact surfaces of mems switches. P. 114-139.

UDC 621.318.5:681.3

The method of x-ray spectral microanalysis is used to investigate the chemical com-position and morphological characteristics of contact surfaces of MEMS switches. The paper describes methods of localizing impurity and investigating technological medium. It also pro-vides a mathematical model and investigates the connection between the porosity of electro-plated coatings and the concentration of microparticles. The paper analyzes several types of impurities and provides a quantitative analysis of the characteristics of their surfaces. The paper maintains that copper and aluminum impurities on the surface of contacts results in increasing resistance and decreasing resources of equipment. The paper maintains that the chemical composition and morphological characteristics predetermine the amount and stability of resistance and hence define the efficiency and performance of MEMS switches.

microelectromechanical system, MEMS switch, chemical composition, morphology, contact surface, electrical resistance, x-ray spectral microanalysis, RSMA, surface impurity

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