2015-№4(49) Article 15

I.A. Zeltser

Technological artifacts in production of magnetically operated sealed switches (hermetically sealed switches). Р. 173-189.

UDC 53.06

The methods of focused-beam microscopy and X-ray spectral microanalysis are used to investigate the morphology and structure of the contact plating of front switches and gate switches. The paper shows that some defects are caused by abnormally high concentration of chemically active elements in the glass and on the plating, which reduces parasitic resistance and leads to the formation of crystals of potassium chloride and sodium chloride on the contact plating.

magnetically operated sealed switch, hermetically sealed switch, microelectromechanical system, contact plating, focused-beam microscopy, X-ray spectral microanalysis, ruthenium

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